硅烷在常温常压下为无色、无毒、非常活跃的压缩气体。在温室能自然，在空气中或卤素气体中发生爆炸性燃烧。硅烷浓度在小于1%时不燃，大于3%时自燃，1%~3%时可能燃烧。
硅烷技术指标：
| 组分/杂质 | 硅烷/4.0N | 硅烷/5.0N | 硅烷/6.0N |
| 硅烷含量 | 99.99% | 99.9999% | 99.9999% |
| 氧（氩）O2（Ar） | ≤1ppm | ≤0.4ppm | ≤0.1ppm |
| 氮N2 | ≤1ppm | ≤0.2ppm | ≤0.1ppm |
| 氢H2 | ≤50ppm | ≤30ppm | ≤20ppm |
| 氦He | - | ≤10ppm | ≤10ppm |
| 一氧化碳+二氧化碳 | ≤0.2ppm | ≤0.4ppm | ≤0.1ppm |
| 总碳THC | ≤0.2ppm | ≤0.2ppm | ≤0.1ppm |
| 氯化物THCL | ≤15ppm | ≤0.2ppm | ≤0.1ppm |
| 甲硅醚 | ≤1ppm | ≤0.2ppm | ≤0.1ppm |
| 乙硅烷Si2H6 | ≤1ppm | ≤0.2ppm | ≤0.1ppm |
| 水分H2O | ≤1ppm | ≤0.2ppm | ≤0.1ppm |
硅烷包装种类
| 钢瓶种类 | 气体压力 | 气体体积 | 气体净重 |
| 44LDOT钢瓶 | 12MPa | 7或10.5m3 | 10或15KG |
| 440L硅烷Y罐 | 12MPa | 88m3 | 125kg |
钢瓶接口：CGA350或JISS632
